Abstract
We fabricated Fe films from deep eutectic solvent (DES)-based plating baths using constant direct current and investigated the effect of the current density and the bath concentration on the plating rate, magnetic properties and surface roughness of the Fe films. The plating rate increased with increasing the current density, and the maximum plating rate depended on the FeCl2 concentration in the plating bath. The FeCl2 concentration affected the surface roughness, and we confirmed that a high FeCl2 concentration was effective in obtaining Fe films with smooth surfaces. Without deteriorations of the surface roughness or the soft magnetic properties, we consequently obtained a high plating rate value of approximately 930 μm/h by the increases in the current density and the FeCl2 concentration. We, therefore, concluded that the DES is a promising solvents for high-speed plating of Fe films.
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Yanai, T., Yamaguchi, T., Nakano, M. et al. High-Speed Electroplating of Fe Films Using DES-Based Plating Baths. J. Electron. Mater. 48, 1330–1334 (2019). https://doi.org/10.1007/s11664-018-6764-x
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DOI: https://doi.org/10.1007/s11664-018-6764-x