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Characterization of CrAlN Films Synthesized by DC Reactive Magnetron Sputtering

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Advances in Mechanical Engineering, Materials and Mechanics (ICAMEM 2019)

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Abstract

CrAlN films were synthesized by DC reactive magnetron sputtering. The influence of the aluminium content on the microstructure, hardness and the friction coefficient of the CrAlN films have been investigated. Results indicate that all CrAlN coatings present a columnar and dense structure. Also, CrAlN coatings present a better hardness than CrN coating. The increase of Al rate from 3.5 to 11% is accompanied by a decrease of hardness from 28 to 24 GPa and then it increases for an Al rate of 24%. The addition of Al to the CrN system causes an increase of the friction coefficient and the wear resistance.

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References

  • Kong, Q., Ji, L., Li, H., Liu, X., Wang, Y., Chen, J., Zhou, H.: Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering. Appl. Surf. Sci. 257, 2269–2274 (2011)

    Article  Google Scholar 

  • Jianxin, D., Fengfang, W., Yunsong, L., Youqiang, X., Shipeng, L.: Erosion wear of CrN, TiN, CrAlN, and TiAlN PVD nitride coatings. Int. J. Refractory Metals Hard Mater. 35, 10–16 (2012)

    Article  Google Scholar 

  • Shan, L., Wang, Y., Li, J., Chen, J.: Effect of N2 flow rate on microstructure and mechanical properties of PVD CrNx coatings for tribological application in seawater. Surf. Coat. Technol. 242, 74–82 (2014)

    Article  Google Scholar 

  • Wang, L., Nie, X.: Effect of annealing temperature on tribological properties and material transfer phenomena of CrN and CrAlN coatings. J. Mat. Eng. Perform. 23(2), 560–571 (2014)

    Article  Google Scholar 

  • Reiter, A., Derflinger, V., Hanselmann, B., Bachmann, T., Sartory, B.: Investigation of the properties of Al1-xCrxN coatings prepared by cathodic arc evaporation. Surf. Coat. Technol. 200, 2114–2122 (2005)

    Article  Google Scholar 

  • Nouveau, C., Tlili, B., Aknouche, H., Benlatreche, Y., Patel, B.: Comparison of CrAlN layers obtained with one (CrAl) or two targets (Cr and Al) by magnetron sputtering. Thin Solid Films 520(7), 2932–2937 (2012)

    Article  Google Scholar 

  • Lin, J., Mishra, B., Moore, J., Sproul, W.: A study of the oxidation behavior of CrN and CrAlN thin films in air using DSC and TGA analyses A study of the oxidation behavior of CrN and CrAlN thin films in air using DSC and TGA analyses. Surface Coat. Technol. 202, 3272–3283 (2008)

    Article  Google Scholar 

  • Ding, X., Tan, A., Zeng, X., Wang, C., Yue, T., Sun, C.: Corrosion resistance of CrAlN and TiAlN coatings deposited by lateral rotating cathode arc. Thin Solid Films 516, 5716–5720 (2008)

    Article  Google Scholar 

  • Lv, Y., Ji, L., Liu, X., Li, H., Zhou, H., Chen, J.: The structure and properties of CrAlN fi lms deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles. Surf. Coat. Technol. 206, 3961–3969 (2012)

    Article  Google Scholar 

  • Aouadi, K., Tlili, B., Nouveau, C., Besnard, A., Chafra, M., Souli, R.: Influence of substrate bias voltage on corrosion and wear behavior of physical vapor deposition CrN coatings. J. Mater. Eng. Perform. 28(5), 2881–2891 (2019)

    Article  Google Scholar 

  • Rahmoun, K., Iost, A., Keryvin, V., Guillemot, G., Sari, N.: A multilayer model for describing hardness variations of aged porous silicon low-dielectric-constant thin films. Thin Solid Films 518(1), 213–221 (2009)

    Article  Google Scholar 

  • Barshilia, H.C., Selvakumar, N., Deepthi, B., Rajam, K.S.: A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings. Surf. Coat. Technol. 201, 2193–2201 (2006)

    Article  Google Scholar 

  • Lin, J., Mishra, B., Moore, J., Sproul, W.: Microstructure, mechanical and tribological properties of Cr1-xAlxN films deposited by pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS). Surf. Coat. Technol. 201, 4329–4333 (2006)

    Article  Google Scholar 

  • Ding, X., Zeng, X.: Structural, mechanical and tribological properties of CrAlN coatings deposited by reactive unbalanced magnetron sputtering. Surf. Coat. Technol. 200, 1372–1376 (2005)

    Article  Google Scholar 

  • Bobzin, K., Lugscheider, E., Nickel, R., Bagcivan, N., Kramer, A.: Wear behavior of Cr1-xAlxN PVD-coatings in dry running conditions. Wear 263, 1274–1280 (2007)

    Article  Google Scholar 

  • Wang, L., Zhang, G., Wood, R., Wang, S., Xue, Q.: Fabrication of CrAlN nanocomposite films with high hardness and excellent anti-wear performance for gear application. Surf. Coat. Technol. 204(2010), 3517–3524 (2010)

    Article  Google Scholar 

  • Aihua, L., Jianxin, D., Haibing, C., Yangyang, C., Jun, Z.: Friction and wear properties of TiN, TiAlN, AlTiN and CrAlN PVD nitride coatings. J. Refractory Metals Hard Mater. 31(2012), 82–88 (2012)

    Article  Google Scholar 

  • Hua, M., Ma, H., Li, J., Mok, C.K.: Tribological behaviours of patterned PVD TiN spot coatings on M2 steel coated with different bias voltages. Surface Coat. Technol. 200(11), 3612–3625 (2006)

    Article  Google Scholar 

  • Li, T., Li, M., Zhou, Y.: Phase segregation and its effect on the adhesion of Cr–Al–N coatings on K38G alloy prepared by magnetron sputtering method. Surf. Coat. Technol. 201(2007), 7692–7698 (2007)

    Article  Google Scholar 

  • Shew, B., Huang, J.: The effects of nitrogen flow on reactively sputtered Ti-A1-N films. Surf. Coat. Technol. 71(1995), 30–36 (1995)

    Article  Google Scholar 

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Acknowledgments

The authors are grateful to the Regional Council of Burgundy for its financial support, Mr. Denis LAGADRILLERE for the SEM observations. Also, authors would like to think Pr. Alain IOST and Dr. Alberto MEJIAS for their help in nano-indentation and scratch test measurements.

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Correspondence to K. Aouadi .

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Aouadi, K., Nouveau, C., Besnard, A., Tlili, B., Montagne, A., Chafra, M. (2021). Characterization of CrAlN Films Synthesized by DC Reactive Magnetron Sputtering. In: Kharrat, M., Baccar, M., Dammak, F. (eds) Advances in Mechanical Engineering, Materials and Mechanics. ICAMEM 2019. Lecture Notes in Mechanical Engineering. Springer, Cham. https://doi.org/10.1007/978-3-030-52071-7_40

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  • DOI: https://doi.org/10.1007/978-3-030-52071-7_40

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-52070-0

  • Online ISBN: 978-3-030-52071-7

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